概述:
電動(dòng)激光口徑控制模塊是一個(gè)電動(dòng)器件,可以實(shí)現(xiàn)對(duì)激光X、Y以及θ方向的口徑和波形的控制。
規(guī)格參數(shù):
Input
Beam Height 60 mm (other configurations upon request)
Fluence 10 J/cm2 max
Diameter 3.6 mm min (beam must fill maximum slit)
Output
X, Y
Range 0 – 2.5 mm
Resolution 1.0 % (25 um)
Accuracy +/-(25 um + .01 * position)
Speed < 1.0 s full range of travel
Theta
Range +/– 45 degrees from horizontal
Resolution 1.1 % (.50 degrees)
Accuracy +/- (1 degree + .01*theta)
Speed < 1.0 s full range of travel |